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1

Accurate Dopant and Interface Characterization in Oxidized SiC with Refined Non-Contact C-V Technique

Savtchouk, Alexander, Wilson, Marshall, Almeida, Carlos, Marinskiy, Dmitriy, Hillard, Robert, Lagowski, Jacek

Journal:

Materials Science Forum

Year:

2019

File:

PDF, 734 KB

2019

2

Non-contact charge-voltage method for dielectric characterization on small test areas of IC product wafers

Piotr Edelman, Dmitriy Marinskiy, Carlos Almeida, Joseph N. Kochey, Anton Byelyayev, Marshall Wilson, Alexandre Savtchouk, John D’Amico, Andrew Findlay, Lubek Jastrzebski, Jacek Lagowski

Journal:

Materials Science in Semiconductor Processing

Year:

2006

Language:

english

File:

PDF, 258 KB

english, 2006

3

Full wafer non-contact mapping of electrical properties of ultra-thin advanced dielectrics on Si

Piotr Edelman, Jacek Lagowski, Alexandre Savtchouk, Marshall Wilson, Andrey Aleynikov, Dmitriy Marinskiy, Joaquin Navarro

Journal:

Materials Science and Engineering: B

Year:

2002

Language:

english

File:

PDF, 287 KB

english, 2002

4

Band offset diagnostics of advanced dielectrics

Piotr Edelman, Marshall Wilson, John D’Amico, Alexandre Savtchouk, Jacek Lagowski

Journal:

Journal of Materials Science: Materials in Electronics

Year:

2008

Language:

english

File:

PDF, 585 KB

english, 2008

5

Accelerated Light-Induced Degradation (ALID) for Monitoring of Defects in PV Silicon Wafers and Solar Cells

Marshall Wilson, Piotr Edelman, Alexandre Savtchouk, John D’Amico, Andrew Findlay, Jacek Lagowski

Journal:

Journal of Electronic Materials

Year:

2010

Language:

english

File:

PDF, 933 KB

english, 2010

6

QSS-μPCD measurement of lifetime in silicon wafers: advantages and new applications

Marshall Wilson, Alexandre Savtchouk, Jacek Lagowski, Krisztian Kis-Szabo, Ferenc Korsos, Atilla Toth, Radovan Kopecek, Valentin Mihailetchi

Journal:

Energy Procedia

Year:

2011

Language:

english

File:

PDF, 2.18 MB

english, 2011

7

Novel noncontact approach to monitoring the field-effect passivation of emitters

Marshall Wilson, Alexandre Savtchouk, Jacek Lagowski, Ferenc Korsos, Atilla Toth, Radovan Kopecek, Valentin Mihailetchi, Roman Petres, Tim Boescke

Journal:

Energy Procedia

Year:

2011

Language:

english

File:

PDF, 1.38 MB

english, 2011

8

Semiconductor surface spectroscopies: the early years

Journal:

Surface Science

Year:

1994

Language:

english

File:

PDF, 962 KB

english, 1994

9

Surface photovoltage studies on plastically deformed germanium

Małgorzata Pajdzinska, Andrzej Morawski, Jacek Łagowski

Journal:

Surface Science

Year:

1969

Language:

english

File:

PDF, 193 KB

english, 1969

10

The effect of edge dislocations on the electrical properties of the real germanium surface

Jacek Łagowski, Andrzej Morawski, Jerzy Sochański

Journal:

Surface Science

Year:

1970

Language:

english

File:

PDF, 640 KB

english, 1970

11

Surface piezoresistance in germanium

Jacek J. z.xl:Lagowski, Andrzej Morawski, Jerzy J. Sochański

Journal:

Surface Science

Year:

1970

Language:

english

File:

PDF, 219 KB

english, 1970

12

Determination of surface state energy positions by surface photovoltage spectrometry: CdS

Chester L. Balestra, Jacek Łagowski, H.C. Gatos

Journal:

Surface Science

Year:

1971

Language:

english

File:

PDF, 199 KB

english, 1971

13

Surface piezoresistance in germanium and silicon

Jerzy Sochański, Jacek Łagowski, Andrzej Morawski

Journal:

Surface Science

Year:

1971

Language:

english

File:

PDF, 541 KB

english, 1971

14

Photovoltage inversion effect and its application to semiconductor surface studies: CdS

Jacek Łagowski, Chester L. Balestra, Harry C. Gatos

Journal:

Surface Science

Year:

1971

Language:

english

File:

PDF, 646 KB

english, 1971

15

Determination of surface state parameters from surface photovoltage transients: CdS

Jacek Łagowski, Chester L. Balestra, Harry C. Gatos

Journal:

Surface Science

Year:

1972

Language:

english

File:

PDF, 492 KB

english, 1972

16

Surface photovoltage spectroscopy and surface piezoelectric effect in GaAs

Jacek Łagowski, Ioan Baltov, Harry C. Gatos

Journal:

Surface Science

Year:

1973

Language:

english

File:

PDF, 634 KB

english, 1973

17

Photomechanical vibration of thin crystals of polar semiconductors

Jacek Łagowski, Harry C. Gatos

Journal:

Surface Science

Year:

1974

Language:

english

File:

PDF, 1.01 MB

english, 1974

18

Improved QSS-μPCD measurement with quality of decay control: Correlation with steady-state carrier lifetime

Wilson, Marshall, Edelman, Piotr, Lagowski, Jacek, Olibet, Sara, Mihailetchi, Valentin

Journal:

Solar Energy Materials and Solar Cells

Year:

2012

Language:

english

File:

PDF, 944 KB

english, 2012

19

Unified Lifetime Metrology and Photoluminescence Imaging of Passivation Defects for Silicon PV

Wilson, Marshall, Lagowski, Jacek, Edelman, Piotr, Korsos, Ferenc, Nadudvari, Gyorgy, Kiss, Zoltan, Schmauder, Joerg, Mihailetchi, Valentin, Olibet, Sara

Journal:

Energy Procedia

Year:

2013

Language:

english

File:

PDF, 1.55 MB

english, 2013

20

[IEEE 2013 IEEE 39th Photovoltaic Specialists Conference (PVSC) - Tampa, FL, USA (2013.06.16-2013.06.21)] 2013 IEEE 39th Photovoltaic Specialists Conference (PVSC) - Importance of defect photoionization in silicon-rich SiNx dielectrics for high PID resistance

Wilson, Marshall, Savthouck, Alexandre, D'Amico, John, Lagowski, Jacek, Schmitt, Stefan, Schneider, Andreas, Olibet, Sara

Year:

2013

Language:

english

File:

PDF, 575 KB

english, 2013

21

[IEEE 2014 IEEE 40th Photovoltaic Specialists Conference (PVSC) - Denver, CO, USA (2014.6.8-2014.6.13)] 2014 IEEE 40th Photovoltaic Specialist Conference (PVSC) - Experimental study on the role of parameters affecting surface recombination and emitter passivation

Wilson, Marshall, Findlay, Andrew, D'Amico, John, Savtchouk, Alexandre, Lagowski, Jacek, Xu, Zhan, Yang, Rong, Guo, Ted

Year:

2014

Language:

english

File:

PDF, 2.05 MB

english, 2014

22

[IEEE 2013 IEEE 39th Photovoltaic Specialists Conference (PVSC) - Tampa, FL, USA (2013.06.16-2013.06.21)] 2013 IEEE 39th Photovoltaic Specialists Conference (PVSC) - Single image concept for photoluminescence based emitter saturation current imaging using direct calibration by the QSS-μPCD method

Korsos, Ferenc, Zsovar, Andras, Lagowski, Jacek, Wilson, Marshall, Kiss, Zoltan, Kovacs, Zsolt, Nadudvari, Gyorgy

Year:

2013

Language:

english

File:

PDF, 545 KB

english, 2013

23

[IEEE 2012 IEEE 38th Photovoltaic Specialists Conference (PVSC) - Austin, TX, USA (2012.06.3-2012.06.8)] 2012 38th IEEE Photovoltaic Specialists Conference - Unified Lifetime measurement for silicon PV

Wilson, Marshall, Lagowski, Jacek, Edelman, Piotr, Savtchouk, Alexandre, Findlay, Andrew, Olibet, Sara, Mihailetchi, Valentin

Year:

2012

Language:

english

File:

PDF, 1.19 MB

english, 2012

24

(Invited) GaAs MIS Structures–Hopeless or Promising?

Gatos, Harry C., Lagowski, Jacek, Kazior, Thomas E.

Journal:

Japanese Journal of Applied Physics

Year:

1983

File:

PDF, 1.29 MB

1983

25

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Manifestation of Cu Impurities on Silicon Surfaces, Implication for Monitoring Cu Contamination

Wilson, Marshall, Savtchouk, Alexandre, D'Amico, John, Tasarov, Igor, Jastrzebski, Lubek, Lagowski, Jacek

Year:

2007

Language:

english

File:

PDF, 440 KB

english, 2007

26

Non-contact Corona-Kelvin based Metrology for High-k Dielectric Characterization with an Extension to Micro-Scale Measurement

Wilson, Marshall, Marinskiy, Dmitriy, Almeida, Carlos, Kochey, Joseph N., Byelyayev, Anton, Savtchouk, Alexandre, D'Amico, John, Findlay, Andrew, Jastrzebski, Lubek, Lagowski, Jacek

Journal:

MRS Proceedings

Year:

2006

Language:

english

File:

PDF, 170 KB

english, 2006

27

Inline PL Inspection and Advanced Offline Evaluation of Passivation Defects, Charge and Interfaces

Findlay, Andrew, Lagowski, Jacek, Wilson, Marshall, D'Amico, John, Savtchouk, Alexandre, Korsos, Ferenc, Nadudvari, György

Journal:

Solid State Phenomena

Year:

2013

Language:

english

File:

PDF, 1.14 MB

english, 2013

28

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - The Present Status and Recent Advancements in Corona-Kelvin Non-Contact Electrical Metrology of Dielectrics for IC-Manufacturing

Wilson, Marshall, Marinskiy, Dmitriy, Byelyayev, Anton, D'Amico, John, Findlay, Andrew, Jastrzebski, Lubek, Lagowski, Jacek

Year:

2006

Language:

english

File:

PDF, 3.67 MB

english, 2006

29

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Digital SPV Diffusion Length Metrology (E8-Fe) for Ultra-High Purity Silicon Wafers

Wilson, Marshall, Savtchouk, Alexandre, Tasarov, Igor, D'Amico, John, Edelman, Piotr, Kochey, Nick, Lagowski, Jacek

Year:

2008

Language:

english

File:

PDF, 2.49 MB

english, 2008

30

SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II - Contact potential difference methods for full wafer characterization of Si/SiO2 interface defects induced by plasma processing

Edelman, Piotr, Savchouk, A., Wilson, M., Jastrzebski, Lubek, Lagowski, Jacek J., Nauka, Christopher, Ma, Shawming, Hoff, Andrew M., DeBusk, Damon K., Ajuria, Sergio A., Hossain, Tim Z.

Year:

1998

Language:

english

File:

PDF, 1.86 MB

english, 1998

31

Drift characteristics of mobile ions in SiNx films and solar cells

Wilson, Marshall, Savtchouk, Alexandre, Edelman, Piotr, Marinskiy, Dmitriy, Lagowski, Jacek

Journal:

Solar Energy Materials and Solar Cells

Year:

2015

Language:

english

File:

PDF, 1.49 MB

english, 2015

32

Non-Contact, No Wafer Preparation Deep Level Transient Spectroscopy Based on Surface Photovoltage

Lagowski, Jacek, Morawski, Andrzej, Edelman, Piotr

Journal:

Japanese Journal of Applied Physics

Year:

1992

Language:

english

File:

PDF, 198 KB

english, 1992

33

SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Monday 18 September 2000)] Process Control and Diagnostics - Small signal ac-surface photovoltage technique for noncontact monitoring of near-surface doping for IC-processing

Marinskiy, Dmitriy N., Lagowski, Jacek J., Wilson, M., Jastrzebski, Lubek, Santiesteban, R., Elshot, Kim, Miller, Michael L., Ashtiani, Kaihan A.

Year:

2000

Language:

english

File:

PDF, 250 KB

english, 2000

34

Non-Visual Defect Monitoring with Surface Voltage Mapping: Application for Semiconductor IC and PV Technology

Edelman, Piotr, Marinskiy, Dmitriy, Savtchouk, Alexander, D'Amico, John, Findlay, Andrew, Wilson, Marshall, Almeida, Carlos, Lagowski, Jacek

Journal:

Solid State Phenomena

Year:

2015

Language:

english

File:

PDF, 1.20 MB

english, 2015

35

SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Real-time preparation-free imaging of mobile charge in SiO2

Jastrzebski, Lubek, Edelman, Piotr, Lagowski, Jacek J., Hoff, Andrew M., Savchouk, A., Persson, Eric, DeBusk, Damon K., Chen, Ray T.

Year:

1996

Language:

english

File:

PDF, 533 KB

english, 1996

36

Non-Visual Defect Monitoring with Surface Voltage Mapping

Findlay, Andrew, Marinskiy, Dmitriy, Edelman, Piotr, Wilson, Marshall, Savtchouk, Alexandre, Lagowski, Jacek

Journal:

ECS Journal of Solid State Science and Technology

Year:

2016

Language:

english

File:

PDF, 2.66 MB

english, 2016

37

Kelvin Force Microscopy and corona charging for semiconductor material and device characterization

Marinskiy, Dmitriy, Edelman, Piotr, Lagowski, Jacek, Loy, Thye Chong, Almeida, Carlos, Savtchouk, Alexandre

Journal:

Superlattices and Microstructures

Year:

2016

Language:

english

File:

PDF, 1.05 MB

english, 2016

38

Non-Contact, Wafer-Scale Deep Level Transient Spectroscopy (DLTS) Based on Surface Photovoltage (SPV)

Lagowski, Jacek, Morawski, Andrzej, Edelman, Piotr

Journal:

MRS Proceedings

Year:

1991

Language:

english

File:

PDF, 326 KB

english, 1991

39

Non-Contact, No Wafer Preparation Deep Level Transient Spectroscopy (DlTS) Based on Surface Photovoltage (SPV)

Lagowski, Jacek, Edelman, Piotr, Dexter, Mark

Journal:

MRS Proceedings

Year:

1992

Language:

english

File:

PDF, 309 KB

english, 1992

40

Surface Charge Imaging in Semiconductor Wafers by Surface Photovoltage (SPV)

Edelman, Piotr, Lagowski, Jacek, Jastrzebski, Lubek

Journal:

MRS Proceedings

Year:

1992

Language:

english

File:

PDF, 3.24 MB

english, 1992

41

A Lifetime Study of Oxygen Agglomeration Induced Defects in Cz Silicon Crystal by Surface Photovoltage (SPV)

Mishra, Kamal, Huber, W., Lagowski, Jacek

Journal:

MRS Proceedings

Year:

1992

Language:

english

File:

PDF, 1019 KB

english, 1992

42

Porous Silicon Luminescence Study by Imaging Methods: Relationship to Pore Dimensions

Kontkiewicz, Anna, Kontkiewicz, Andrzej M., Sen, Sidhartha, Wesolowski, Marek, Lagowski, Jacek, Edelman, Piotr, Kowalewski, Tomasz

Journal:

MRS Proceedings

Year:

1994

Language:

english

File:

PDF, 2.00 MB

english, 1994

43

Contamination Monitoring Using Surface Photovoltage and Application to Process Line Control

Jastrzebski, Lubek, Lagowski, Jacek, Henley, Worth, Edelman, Piotr

Journal:

MRS Proceedings

Year:

1994

Language:

english

File:

PDF, 701 KB

english, 1994

44

Ultrasound Defect Engineering of Transition Metals Via Metal-Acceptor Pairs in Silicon

Bell, Ronald E., Ostapenko, Serguei, Lagowski, Jacek

Journal:

MRS Proceedings

Year:

1995

Language:

english

File:

PDF, 368 KB

english, 1995

45

Non-Contact Mapping of Fe Contamination in Oxidized Si Wafers with Sensitivity in Part-Per-Trillion Range

Lagowski, Jacek, Edelman, Piotr

Journal:

MRS Proceedings

Year:

1996

Language:

english

File:

PDF, 2.03 MB

english, 1996

46

[IEEE 2015 IEEE 42nd Photovoltaic Specialists Conference (PVSC) - New Orleans, LA (2015.6.14-2015.6.19)] 2015 IEEE 42nd Photovoltaic Specialist Conference (PVSC) - State-of-the-art multiparameter characterization of the chemical and field effect passivation of very high lifetime n-Si with n+ front surface field (FSF)

Wilson, Marshall, Findlay, Andrew, D'Amico, John, Savtchouk, Alexandre, Lagowski, Jacek

Year:

2015

Language:

english

File:

PDF, 1.91 MB

english, 2015

47

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing - New approach to measuring oxide charge and mobile ion concentration

Edelman, Piotr, Hoff, Andrew M., Jastrzebski, Lubek, Lagowski, Jacek J., Mathur, Jagdish P., Lowell, John K., Chen, Ray T.

Year:

1994

Language:

english

File:

PDF, 963 KB

english, 1994

48

Accurate Doping Density Determination in SiC with Constant Surface Potential Corona Charging; Industry Ready Alternative to Hg-CV

Savtchouk, Alexander, Wilson, Marshall, Lagowski, Jacek, Czett, Andor, Buday, Csaba

Journal:

Materials Science Forum

Year:

2016

Language:

english

File:

PDF, 349 KB

english, 2016

49

[IEEE 2016 IEEE 43rd Photovoltaic Specialists Conference (PVSC) - Portland, OR, USA (2016.6.5-2016.6.10)] 2016 IEEE 43rd Photovoltaic Specialists Conference (PVSC) - Spatially resolved characterization of ARC films on multicrystalline silicon with a non-contact surface voltage technique

Savtchouk, Alexandre, Lagowski, Jacek, Edelman, Piotr, Wilson, Marshall, Findlay, Andrew

Year:

2016

Language:

english

File:

PDF, 666 KB

english, 2016

50

SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 28 January 2017)] Gallium Nitride Materials and Devices XII - Piezoelectric modulation of surface voltage in GaN and AlGaN/GaN: charge screening effects and 2DEG

Chyi, Jen-Inn, Fujioka, Hiroshi, Morkoç, Hadis, Nanishi, Yasushi, Schwarz, Ulrich T., Shim, Jong-In, Wilson, Marshall, Schrayer, Bret, Savtchouk, Alexandre, Hillard, Bob, Lagowski, Jacek

Year:

2017

Language:

english

File:

PDF, 854 KB

english, 2017

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